The 82nd JSAP Autumn Meeting 2021

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[12a-S401-1~8] 1.3 Novel technologies and interdisciplinary engineering

Sun. Sep 12, 2021 9:15 AM - 11:30 AM S401 (Oral)

Akihiro Matsutani(Tokyo Tech)

9:30 AM - 9:45 AM

[12a-S401-2] Fabrication and evaluation of V1-xCrxO2 (x = 0.01–0.15) thin films by MOD

〇(M2)Yuta Ochiai1, Masami Kawahara2, Tsuyoshi Samura2, Takashi Tachiki1, Takashi Uchida1 (1.National Defense Academy, 2.Kojundo Chemical Lab.)

Keywords:semiconductor, oxide electronics, thin film