The 82nd JSAP Autumn Meeting 2021

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Oral presentation

3 Optics and Photonics » 3.10 Optical quantum physics and technologies

[12p-N103-1~16] 3.10 Optical quantum physics and technologies

Sun. Sep 12, 2021 1:30 PM - 5:45 PM N103 (Oral)

Takahiro Inagaki(NTT), Mamoru Endo(Univ. of Tokyo)

2:15 PM - 2:30 PM

[12p-N103-4] Toward on-chip integration of free-space linear optical circuit

Takumi Ishikawa1, Takuya Inagaki1, Ryo Kikuchi1, Kohei Haji1, Hirohito Yamada1, 〇Nobuyuki Matsuda1,2 (1.Eng., Tohoku Univ., 2.OAS, Tohoku Univ.)

Keywords:silicon photonics, Deep RIE