The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12p-N203-1~12] 6.4 Thin films and New materials

Sun. Sep 12, 2021 1:30 PM - 4:45 PM N203 (Oral)

Katsuhisa Tanaka(Kyoto Univ.), Yoshinobu Nakamura(Univ. of Tokyo), Osamu Nakatsuka(Nagoya Univ.)

4:30 PM - 4:45 PM

[12p-N203-12] Thermal Conductivity of Magnesium Oxide Insulating Films Synthesized by Chelate Flame Deposition

〇Ruohui Xu1, Keiji Komatsu1, Atsushi Nakamura1,2, Osamu Ito1,2, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.Chubu Chelest)

Keywords:Chelate Flame Deposition, Magnesium Oxide Insulating Films, Thermal Conductivity