The 82nd JSAP Autumn Meeting 2021

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21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12p-N206-1~19] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sun. Sep 12, 2021 1:00 PM - 6:15 PM N206 (Oral)

Mutsumi Sugiyama(Tokyo Univ. of Sci.), Katayama Tsukasa(Hokkaido Univ), Riena Jinno(Univ of Tokyo)

4:00 PM - 4:15 PM

△ [12p-N206-12] Growth and characterization of (InxGa1−x)2O3 alloy thin films for transparent conductive thin films in the deep-UV region.

〇(M1)Yuri Ogura1, Yuta Arata1, Takumi Ikenoue2, Hiroyuki Nishinaka1, Masahiro Yoshimoto1 (1.Kyoto Inst. of Tech., 2.Kyoto Univ.)

Keywords:alloy