Fabrication and Characterization of Y doped HZO Thin Films by Chemical Solution Deposition

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Shintaro Yasui(Tokyo Tech), Takashi Eshita(Wakayama Univ.)

4:00 PM - 4:15 PM

〇Keisuke Sasaki¹, Mohit Mohit¹, Eisuke Tokumitsu¹ (1.JAIST)

Keywords:Ferroelectric, Hafnium-based ferroelectric material, semiconductor