Influence of Substrate Orientation on Crystalline Structures of Hf-oxide layers Formed by Post-oxidation of Hf/Si structures

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Shintaro Yasui(Tokyo Tech), Takashi Eshita(Wakayama Univ.)

4:45 PM - 5:00 PM

〇(M1)Wataru Yasuda¹, Noriyuki Taoka¹, Akio Ohta¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

Keywords:Hf-oxide, Composition ratio, Crystalline structures