[12p-N301-1~15] 6.1 Ferroelectric thin films

[12p-N301-6] Deposition and characterization of Pb(Zr, Ti)O₃ artificial superlattice thin films

〇(M1)Goki Kimura¹, SangHyo Kweon¹, Goon Tan², Isaku Kanno¹ (1.Kobe Univ., 2.Osaka Pref. Univ.)

Keywords:piezoelectric thin film, superlattice, PZT

In this study, we have fabricated Pb(Zr, Ti)O₃(PZT) artificial superlattice thin films composed of two different Zr/Ti compositions. The c-axis oriented PZT superlattice thin films were epitaxially grown on Si substrates by multi RF magnetron sputtering. The in-plane lattice constant was changed by the combination of PZT composition and the clear relationship between piezoelectric properties and in-plane lattice constant was confirmed.