4:30 PM - 4:45 PM
[12p-N304-12] A consideration of the reaction of neutral electroless copper plating
Keywords:neutral electroless copper plating, electroless copper plating
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Sun. Sep 12, 2021 1:30 PM - 5:15 PM N304 (Oral)
Yusuke Higashi(Kioxia), Junichi Koike(東北大)
4:30 PM - 4:45 PM
Keywords:neutral electroless copper plating, electroless copper plating