[12p-N304-1~14] 13.5 デバイス／配線／集積化技術

▲ [12p-N304-14] Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films against Cu diffusion by the time-lag method

〇(D)Yubin DENG¹、Taewoong Kim¹、Momoko Deura¹、Takeshi Momose¹、Akira Matsuo²、Nobuo Yamaguchi²、Yukihiro Shimogaki¹ (1.The Univ. of Tokyo、2.CANON ANELVA CORP.)

キーワード：Barrier property, Quantitative evaluation