[12p-S301-1~15] 6.2 Carbon-based thin films

▲ [12p-S301-14] High-temperature Magnetic Sensor Based on Single-crystal Diamond MEMS

〇Meiyong Liao¹, Zilong Zhang¹, Liwen Sang¹, Yasuo Koide¹, Satoshi Koizumi¹ (1.National Institute for Materials Science)

Keywords:Diamond, MEMS, Magnetic sensor

In this work, we propose and show the high-temperature (773K) magnetic sensor based on the hybrid structure of Galfenol/Ti/SCD MEMS resonators. The developed magnetic sensor exhibits a stable high-sensitivity of 71.1 Hz/mT and a noise level of ~10 nT/√Hz at 773 K, which exceeds those of the reported magnetic sensors. The concept of SCD MEMS integrating with multilayers offers a promising strategy for developing reliable high-temperature magnetic sensors.