[12p-S301-1~15] 6.2 Carbon-based thin films

[12p-S301-3] Study of pin diode-type NEA electron emitters on p-type (001) substrates

〇(M2)Kazuya Ikuta^1,2, Masahiko Ogura², Hiromitsu Katou², Yukako Katou², Toshiharu Makino², Daisuke Takeuchi^1,2, Ichiro Shoji¹ (1.Chuo Univ., 2.AIST)

Keywords:diamond semiconductor, electron emission

Currently, the largest single crystal quality diamond substrate in market is (001) type, called Mosaic substrate. Then, there must be subjects to overcome in fabrication processes of pin diode-type electron emitters in comparison with the (111) case we have used. In this study, we investigate the properties of emitters fabricated on p-type (001) substrates, which contained different acceptor concentrations. In this talk, we will present the results and discuss capabilities of the emitters on large (001) substrates.