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[13a-N103-5] Fabrication and Optical Properties Silicon-Polymer Hybrid Ring Resonator
Keywords:ring resonator
Previously, four-wave mixing could be potentially obtained from SiN high-Q ring resonator or Si waveguide. However, applying organic nonlinear optics is expected for higher efficiency wavelength conversion. Moreover, four-wave mixing by using Si slot waveguide and nonlinear optical polymer is reported. Therefore, the combination of slot waveguide with ring resonator will be able to not only obtain high efficiency four-wave mixing but also integrate. In this research, Silicon-Polymer Hybrid (SPH) optical device combining high-Q Si ring resonator with nonlinear optical polymer is fabricated. Its diameter, gap between ring and waveguide, as well as slot position were varied. Optical properties Q factor was also measured. Fabrication SPH ring resonator exhibited the maximum Q at 2.8×104