The 82nd JSAP Autumn Meeting 2021

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Oral presentation

12 Organic Molecules and Bioelectronics » 12.4 Organic light-emitting devices and organic transistors

[13a-N205-1~12] 12.4 Organic light-emitting devices and organic transistors

Mon. Sep 13, 2021 9:00 AM - 12:15 PM N205 (Oral)

Toshinori Matsushima(Kyushu Univ.), Yuya Tanaka(Chiba Univ.)

12:00 PM - 12:15 PM

[13a-N205-12] Development of A Quartz Crystal Deposition Controller for Low Rate Deposition

〇Hideki Koizumi1, Yusuke Osada1, Satoru Wakamoto2, Takayuki Chiba3, Junji Kido3 (1.SHOWA SHINKU Co., Ltd., 2.ADVANTEST Corp., 3.Yamagata Univ.)

Keywords:OLED, Low Rate, Deposition Controller