[13a-N321-1~10] 3.11 Photonic structures and phenomena

[13a-N321-2] Improved Electrical Characteristics of CirD (Circular Defect in photonic crystal) lasers Structure by Ozone Cleaning

〇Shunsuke Miyazaki¹, Rubing Zuo¹, Hanqiao Ye¹, Masato Morfuji¹, Hirotake Kaji¹, Akihiro Maruta¹, Masahiko Kondow¹ (1.Osaka Univ.)

Keywords:semiconductor, photonic crystal, laser

In previous our studies, We have not been able to achieve the target values of electrical properties in the samples fabricated, and we have not been able to confirm laser oscillation in optical measurements. The reason for the high electrical resistance is thought to be the presence of a resistive material at the interface between the top electrode and the substrate, which results in a large resistance value in a very small current injection region. Therefore, in this study, we considered the resistive material to be an organic substance and performed ozone cleaning just before the electrode fabrication process of the top surface device to evaluate the electrical and optical properties.