[13a-S301-1~7] 6.2 Carbon-based thin films

△ [13a-S301-1] Development of heavily nitrogen-doped diamond growth with suppression of 2D nucleation

〇Yuta Nakano¹, Shu Inagaki¹, Kazuki Kobayashi¹, Xufang Zhang¹, Tsubasa Matsumoto¹, Takao Inokuma¹, Satoshi Yamasaki¹, Christoph E. Nebel^1,2, Norio Tokuda¹ (1.Kanazawa Univ., 2.Diacara)

Keywords:diamond, nitrogen, nucleation

We investigated nitrogen concentration in the CVD films, diamond film growth rate and 2D nucleation density under the condition of lateral growth (CH₄/H₂ = 0.05 %) using HPHT Ib (111) substrates. As the results, the increase/decrease in growth rate is related to 2D nucleation. Furthermore, we succeeded in high-quality N-doped diamond growth with little 2D nucleation.