[13a-S302-1~11] 10.1 新物質・新機能創成（作製・評価技術）

▲ [13a-S302-2] Ta underlayer effect on ordering of CoPt on Si substrates

〇Ryo Toyama¹、Shiro Kawachi^2,3,4、Jun-ichi Yamaura^2,3、Youichi Murakami³、Hideo Hosono²、Yutaka Majima^1,2 (1.MSL, Tokyo Tech、2.MCES, Tokyo Tech、3.IMSS, KEK、4.Univ. of Hyogo)

キーワード：CoPt, Ta underlayer, L10 ordering

In this study, we investigate the effect of a Ta underlayer on the ordering of CoPt on Si substrates. We also compare the crystal structures of the films with a Ta underlayer with the ones of the films with a Ti underlayer in our previous study.