Resonance frequency shift in a GaAs MEMS beam resonator induced by internal mode coupling

Kyoji Fukuda; Ya Zhang; Isao Morohashi; Kazuhiko Hirakawa

Presentation information

Oral presentation

3 Optics and Photonics » 3.9 Terahertz technologies

[13p-N105-1~14] 3.9 Terahertz technologies

Mon. Sep 13, 2021 1:30 PM - 5:15 PM N105 (Oral)

Takashi Arikawa(Kyoto Univ.), Kazunori Serita(Osaka Univ.)

5:00 PM - 5:15 PM

[13p-N105-14] Resonance frequency shift in a GaAs MEMS beam resonator induced by internal mode coupling

〇Kyoji Fukuda¹, Ya Zhang¹, Isao Morohashi², Kazuhiko Hirakawa^3,4 (1.TUAT, 2.NICT, 3.IIS, Tokyo Univ., 4.NanoQuine, Tokyo Univ.)

Keywords:MEMS, resonator, terahertz

We have investigated the mode coupling effect by measuring the resonance frequency shift of a GaAs MEMS beam resonator when higher order resonance modes were excited.