[13p-S202-1~9] Sensor-Integration Technologies for Sensor Fusion era

[13p-S202-2] [Highlight]Highly sensitive and small sized smell sensor module using film alk acoustic resonator

〇Yosuke Onda¹, Kazuki Sato¹, Takayuki Takano¹, Takeshi Sakashita¹, Akira Saito¹, Masahiko Miyazaki¹, Masashi Hattori¹, Tokihiro Nishihara¹, Hiroyuki Ito² (1.TAIYO YUDEN CO., LTD., 2.Tokyo Inst. of Technology)

Keywords:smell sensor, film bulk acoustic resonator, temperature/humidity compensation

In order to achieve a highly sensitive smell sensor, we are developing a Film bulk acoustic resonator (FBAR) as transducers. We successfully developed the small sized smell sensor modules using a Complementary Metal Oxide Semiconductor (CMOS) based oscillation/detection circuit. We will also report smell identification using the multiple sensor array with various kinds of sensing materials and our novel temperature/humidity compensation method.