The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

4:00 PM - 4:15 PM

[13p-S301-11] Fabrication and structural analysis of a-CNx:H thin films with high nitrogen content
by microwave plasma CVD of the acetylene-nitrogen gas mixture

〇(M2)Yuga Sato1, Haruhiko Ito1 (1.Nagaoka Univ of Tech.)

Keywords:Plasma CVD, Hydrogenated amorphous carbon nitride