3:30 PM - 3:45 PM
[13p-S301-9] Structural analysis of DLC films using low-energy positron and soft X-ray beams
Keywords:amorphous carbon film, positron annihilation spectroscopy, near edge X-ray absorption fine structure
The structure of DLC films was discussed from positron annihilation spectroscopy (PAS) measurements at the slow positron beam system in the B-1 hole of the Kyoto University Research Reactor (KUR) and near-edge X-ray absorption fine structure (NEXAFS) measurements at synchrotron radiation facility NewSUBARU BL09A. The DLC films synthesized by the filtered-cathode vacuum arc method have high Martens hardness, and its positron lifetime, S-parameters, and the sp2/(sp2+sp3) ratio of carbon atoms are smaller than those of other DLC films.