[21a-P03-1~7] 1.3 Novel technologies and interdisciplinary engineering

[21a-P03-3] Development of High-Frequency Wireless QCM Gas Sensor with PDMS Microchannel

〇Hiroki Ato¹, Masahito Kimura¹, Fumihito Kato¹, Noriyasu Masumoto¹, Hiroyuki Noguchi¹ (1.Nippon Inst. Tech.)

Keywords:gas sensor, quartz crystal microbalance, microchannel

Using palladium (Pd), which is a hydrogen storage material, as the sensitive film, and applying the wireless quartz crystal microbalance (QCM) sensor technology, we developed the high-frequency wireless QCM hydrogen gas sensor with the fundamental resonance frequency of 66.65 MHz. In addition, through the experiment, detection of the hydrogen gas with a concentration of 1%, which is below the lower explosive limit, was successful.