[21a-P03-1~7] 1.3 Novel technologies and interdisciplinary engineering

[21a-P03-6] Fundamental Study on Fabrication of Thickness-Shear Vibration Thin Resonator Using Si Anisotropic Etching

〇Junki Shinohara¹, Youhei Suzuki¹, Fumihito Kato¹, Noriyasu Masumoto¹, Hiroyuki Noguchi¹ (1.Nippon Inst. Tech.)

Keywords:resonator, anisotropic etching, piezoelectric analysis

In this study, the fabrication steps of the diaphragm resonator, which vibrate at the thickness shear mode, was investigated and the resonator shape was examined by piezoelectric analysis. The material of the diaphragm resonator was assumed to be AT-cut quartz, however because it was the fundamental study, the fabrication steps were carried out using the silicon thermal oxide film as the alternative material. The piezoelectric analysis of the AT-cut quartz resonator was conducted, and it was found that the diaphragm with four corners fixed by the beams occurred the large displacement over a wider area in the plane at the vicinity of the resonance frequency.