The 82nd JSAP Autumn Meeting 2021

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Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[22a-P01-1~4] 6.1 Ferroelectric thin films

Wed. Sep 22, 2021 9:00 AM - 10:40 AM P01 (Poster)

9:00 AM - 10:40 AM

[22a-P01-3] Evaluation of stress distribution using flexible piezoelectric matrix sensor

〇Ryogo Yokoyama1, Takashi Nakajima1, Masahiro Sato2 (1.Tokyo Univ of Sci., 2.MEMS CORE)

Keywords:piezoelectric, sensor device