[22a-P07-1~6] 7 Beam Technology and Nanofabrication(Poster)

[22a-P07-4] Deep-UV filed emission lamp development

〇Rei Koike¹, Makoto Hosoda², Hidenori Mimura^1,2, Takahiro Matsumoto³, Yoichiro Neo^1,2 (1.Shizuoka Univ., 2.RIE Shizuoka Univ., 3.Nagoya City Univ.)

Keywords:filed emission lamp, electron source