2021年第82回応用物理学会秋季学術講演会

講演情報

一般セッション(ポスター講演)

10 スピントロニクス・マグネティクス » 10 スピントロニクス・マグネティクス(ポスター)

[22p-P02-1~10] 10 スピントロニクス・マグネティクス(ポスター)

2021年9月22日(水) 13:00 〜 14:40 P02 (ポスター)

13:00 〜 14:40

[22p-P02-4] Fabrication and evaluation of Ni thin films on polycarbonate for flexible magnetic sensors

Yuri Ohashi1、Kyohei Hayashi1、Hideo Kaiju1,2 (1.Keio Univ.、2.CSRN, Keio Univ.)

キーワード:flexible magnetic sensor, magnetic thin films, anisotropic magnetoresistance

We investigate structural, electrical, and magnetic properties of Ni thin films on polycarbonate (PC) flexible substrates. As a result, we have successfully fabricated Ni thin films on PC substrates with a small surface roughness of 0.76 nm and a high squareness of 0.97. We also observe a clear Ni/PC interface, in which Ni atoms do not diffuse into PC substrates. The excellent structure properties enable us to achieve a high anisotropic magnetoresistance of 0.65% and to observe inverse magnetostrictive effect by bending Ni thin films on PC substrates.