13:00 〜 14:40
▲ [22p-P02-4] Fabrication and evaluation of Ni thin films on polycarbonate for flexible magnetic sensors
キーワード:flexible magnetic sensor, magnetic thin films, anisotropic magnetoresistance
We investigate structural, electrical, and magnetic properties of Ni thin films on polycarbonate (PC) flexible substrates. As a result, we have successfully fabricated Ni thin films on PC substrates with a small surface roughness of 0.76 nm and a high squareness of 0.97. We also observe a clear Ni/PC interface, in which Ni atoms do not diffuse into PC substrates. The excellent structure properties enable us to achieve a high anisotropic magnetoresistance of 0.65% and to observe inverse magnetostrictive effect by bending Ni thin films on PC substrates.