3:00 PM - 4:40 PM
[22p-P04-4] Anti-reflective Thin Films by Electron-Assisted Deposition of Fuluorosilane Derivative
Keywords:thin films, vacuum, organic materials
Electron- assisted deposition of fluorinated oligomers (FVTMS), one of the characteristic organic materials, was performed and the optical properties of the resulting thin films were evaluated. FVTMS could not be homogeneously deposited by spin-coating method and agglomerated into droplets by simple deposition, but transparent and continuous films were formed by electron-assisted deposition. Comparing the reflection spectra under each condition, it was confirmed that the formation of the deposition films significantly reduced the reflectance.