[23a-P01-1~4] 3.8 Optical measurement, instrumentation, and sensor

[23a-P01-1] In-situ measurement of cleaning glass substrate using a mono-optical fiber type spectrometer

〇Koichi Muro¹ (1.Teikyo Univ.)

Keywords:spectrometer, optical fiber, substrate cleaning

With the development of IoT society and big data utilization, the application fields of ultra-small spectroscopes are expanding. Therefore, we have previously proposed a single optical fiber compact spectroscope equipped with a light source. Observation is possible by bringing the fiber into direct contact with the object, and measurement is possible in an environment such as in a liquid. This time, we tried to evaluate the degree of cleaning of the glass substrate during in-situ.