[23a-P08-1~3] 16.3 Bulk, thin-film and other silicon-based solar cells

[23a-P08-1] Investigation of p-type Microcrystalline Silicon Sputtered Using Highly Boron Doped Silicon Sputtering Target

〇Yuta Shiratori^1,2, Shinsuke Miyajima¹ (1.Tokyo Tech., 2.JSPS research Fellow)

Keywords:Silicon hetero-junction solar cells