[23a-P11-1~18] 13.8 Optical properties and light-emitting devices

[23a-P11-3] Optimization of preparation condition of ZnAl₂O₄ thin film for UV emitting phosphor

〇Naoki Sonoda¹, Kosuke Inoue¹, Hiroko Kominami¹, Kazuhiko Hara¹ (1.Shizuoka Univ.)

Keywords:thin film, UV emission

The demand for ultraviolet sterilization is increasing. The ZnAl2O4 thin film is prepared by thermal diffusion of ZnO and sapphire. The ZnAl2O4 thin film is prepared by thermal diffusion of ZnO and sapphire, and the optimization of the ZnAl2O4 film quality is investigated.