[23p-P02-1~13] 9.2 Nanoparticles, Nanowires and Nanosheets

▲ [23p-P02-13] High Density Formation of Fe-based Silicide Nanodots Induced by Remote H₂ Plasma

Zhixue He¹, 〇Jialin Wu¹, Katsunori Makihara¹, Hai Zhang², Hiroshi Furuhata¹, Noriyuki Taoka¹, Akio Ohta¹, Seiichi Miyazaki¹ (1.Nagoya Univ., 2.Inner Mongolia Univ.)

Keywords:Nanodots, Fe Silicide