[23p-P02-1~13] 9.2 ナノ粒子・ナノワイヤ・ナノシート

▲ [23p-P02-13] High Density Formation of Fe-based Silicide Nanodots Induced by Remote H₂ Plasma

Zhixue He¹、〇Jialin Wu¹、Katsunori Makihara¹、Hai Zhang²、Hiroshi Furuhata¹、Noriyuki Taoka¹、Akio Ohta¹、Seiichi Miyazaki¹ (1.Nagoya Univ.、2.Inner Mongolia Univ.)

キーワード：Nanodots, Fe Silicide