[23p-P11-1~25] 17 Nanocarbon Technology(Poster)

[23p-P11-16] Effect of O₂ adding to MoS₂ growth process by Oxychloride CVD

〇Yoshiki Sakuma¹, Xu Yang¹, Shisheng Li¹, Naoki Ikeda¹ (1.NIMS)

Keywords:TMDC, MoS2, CVD