Kiwamu TAKEHISA

→ Search for Kiwamu TAKEHISA in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques

4:35 PM - 5:05 PM

[18p-Z03-6] 1200X review function of EUV mask blank inspection systems

〇Kiwamu TAKEHISA¹, Tomohiro Suzuki¹, Hiroki Miyai¹, Haruhiko Kusunose¹ (1.Lasertec Corp.)