Shota Nunomura

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

2:15 PM - 2:45 PM

[17p-Z26-3] [The 12th Silicon Technology Division Paper Award Speech] Plasma-induced defects and band structure in c-Si surface passivation process

〇Shota Nunomura¹, Isao Sakata¹, Hajime Sakakita¹, Kazunori Koga², Masaharu Shiratani² (1.AIST, 2.Kyushu Univ.)