Minami Nakamura

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 4:45 PM Z13 (Z13)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.1 Interdisciplinary and General Physics

[16p-Z13-1~12] 1.1 Interdisciplinary and General Physics

2:00 PM - 2:15 PM

△ [16p-Z13-3] Effects of dopant to DIW in freeze cleaning method

〇Minami Nakamura¹, Kensuke Demura¹, Satoshi Nakamura¹, Masaya Kamiya¹, Kei Hattori^1,2 (1.Shibaura Mechatronics Corp, 2.Nagoya Univ. Center for Low-Temperature Plasma Sciences)

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