3:15 PM - 3:30 PM [16p-Z26-8] Changing of structural distortion and stabilization of ferroelectric phase in cap-annealed HfO2 thin films characterized by in-plane and out-of-plane XRD 〇Haruki Momiyama1, Siri Nittayakasetwat1, Koji Kita1 (1.Tokyo Univ.)