Satoshi Akutsu

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

11:30 AM - 11:45 AM

[16a-Z13-10] Relation between chemical bonds and electrical properties of thick insulation film formed by chemical vapor deposition

〇Satoshi Akutsu¹, Kazuyuki Ito¹, Takuo Kikuchi¹, Nobuaki Makino¹, Yoshiyuki Kitahara¹, Tatsuya Ohguro², Yoshihiko Fuji², Mari Takahashi², Yukiko Kashiura² (1.Toshiba, 2.Toshiba Electronic Devices & Storage)

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