Takeyasu Saito

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 3:00 PM - 3:50 PM P05 (Poster)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[16p-P05-1~7] 6.2 Carbon-based thin films

3:00 PM - 3:50 PM

[16p-P05-7] Evaluation of Uniformity in Heavily Boron Doped Layer on a Mosaic Diamond Substrate

Kazuki Fuji¹, Naoki Okamoto¹, 〇Takeyasu Saito¹, Takehiro Shimaoka², Shinya Ohmagari², Hideaki Yamada² (1.Osaka Pref. Univ., 2.AIST ADPERC)

Wed. Mar 17, 2021 9:00 AM - 11:15 AM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17a-Z26-1~9] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM

[17a-Z26-9] Evaluation of NH₂ conversion and barrier property in eletroless plating treatment of ultra-thin electroless NiB film

〇Takeyasu Saito¹, Masashi Rindo¹, Naoki Okamoto¹, Akira Kitajima² (1.Osaka Pref. Univ., 2.Nanotechnology Facilities, Osaka Univ.)