Reijiro Shimura

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 5:15 PM Z13 (Z13)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19p-Z13-1~14] 6.1 Ferroelectric thin films

2:30 PM - 2:45 PM

[19p-Z13-5] Preparation of Y doped HZO ferroelectric thick films at room temperature by the sputtering method and their electrical and piezoelectric properties

〇(PC)Reijiro Shimura¹, Takanori Mimura¹, Akinori Tateyama¹, Takao Shimizu^1,2, Takahisa Shiraishi¹, Hiroshi Funakubo¹ (1.Tokyo Tech. SMCT, 2.NIMS)