Ryoko Yamamoto

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z09 (Z09)

Oral presentation
| 3 Optics and Photonics
| 3.9 Terahertz technologies

[18p-Z09-1~14] 3.9 Terahertz technologies

2:00 PM - 2:15 PM

△ [18p-Z09-3] Improvement of the thermal sensitivity of MEMS sensors with mesh phononic nanostructures

〇Ryoko Yamamoto¹, Naomi Nagai², Kazuhiko Hirakawa^2,3, Akira Kojima¹, Nobuyoshi Koshida¹, Ya Zhang¹ (1.TUAT, 2.IIS Tokyo Univ., 3.INQIE Tokyo Univ.)