2:30 PM - 2:45 PM △ [18p-Z05-5] Channel mobility of 4H-SiC(0001) p-channel MOSFETs with various donor concentrations of n-body 〇Kyota Mikami1, Koji Ito1, Keita Tachiki1, Tsunenobu Kimoto1 (1.Kyoto Univ.)