Ryota Nishimura

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:45 AM - 10:00 AM

[18a-Z17-4] Study on the atmospheric-pressure plasma synthesis of high hardness diamond-like carbon films

〇Ryota Nishimura¹, Hirotaka Mitamura¹, Hiroyuki Yoshiki¹, Hiroyuki Arafune¹ (1.Tsuruoka Kosen)