Kazuma Eto

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z28 (Z28)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17a-Z28-1~10] 15.6 Group IV Compound Semiconductors (SiC)

9:15 AM - 9:30 AM

[17a-Z28-2] Conversion of threading screw dislocation during off-oriented PVT growth of 4H-SiC

〇Kazuma Eto¹, Takeshi Mitani¹, Kenji Momose², Tomohisa Kato¹ (1.AIST, 2.Showa Denko K.K.)