4:00 PM - 4:15 PM
[19p-Z25-12] Residual stress characterization of GaN/Diamond bonding interface by Raman spectroscopy
〇Ayaka Kobayashi1, Yasuo Shimizu2, Yutaka Ohno2, Seong-Woo Kim3, Koji Koyama3, Makoto Kasu4, Naoteru Shigekawa1, Jianbo Liang1 (1.OsakaCity Univ., 2.IMR Tohoku Univ., 3.AdamantNamikiPrecisionJewel Co.,Ltd., 4.Saga Univ.)