KyungPil NAM

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z16 (Z16)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[16a-Z16-1~11] 13.7 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

[16a-Z16-8] Effect of Nitrogen Plasma Treatment on Characteristics of GaN Trench MOSFETs

〇(M2)KyungPil NAM¹, Takashi Ishida^1,2, Maciej Matys², Tsutomu Uesugi², Tetsu Kachi², Jun Suda^1,2 (1.Nagoya University, 2.IMaSS)