Liugang Hu

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 10:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[19a-Z17-1~8] 8.3 Plasma nanotechnology

11:15 AM - 11:30 AM

△ [19a-Z17-6] Atomically etching graphene using O ³P radical generated in remote O₂ plasma

〇Liugang Hu¹, Takayoshi Tsutsumi², Shih-Nan Hsiao², Hiroki Kondo², Kenji Ishikawa², Makoto Sekine², Masaru Hori² (1.Nagoya Univ. Eng., 2.Nagoya Univ. Ctr. Low Temp. Plasma)