Jotaro Nagano

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:30 PM Z26 (Z26)

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[16p-Z26-1~15] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

4:15 PM - 4:30 PM

[16p-Z26-11] Substrate dependence of crystalline phase of ZrO₂ thin film for high temperature deposition

〇Jotaro Nagano¹, Shigehisa Shibayama¹, Mitsuo Sakashita¹, Osamu Nakatsuka^1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)