Takayuki Ohta

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM

[18a-Z17-3] Plasma diagnostics of carbon-HiPIMS for depositing DLC film (2)

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)