Masanori Koyama

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

9:30 AM - 9:45 AM

[18a-Z16-3] Computational study of pattern formation in extreme ultraviolet lithography

〇Masanori Koyama¹, Kyohei Imai¹, Masamitsu Shirai¹, Yoshihiko Hirai¹, Masaaki Yasuda¹ (1.Osaka Pref. Univ.)