The 68th JSAP Spring Meeting 2021

Takashi Kawakubo

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Chairperson, etc.

Wed. Mar 17, 2021 1:30 PM - 3:30 PM Z16 (Z16)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.2 Applications and technologies of electron beams

[17p-Z16-1~8] 7.2 Applications and technologies of electron beams

Takashi Kawakubo(Natl. Inst. of Tech., Kagawa College), Takafumi Ishida(Nagoya University)